DocumentCode
1112886
Title
Exact solution of Dill´s model equations for positive photoresist kinetics
Author
Babu, S.V. ; Barouch, E.
Author_Institution
Clarkson University, Potsdam, NY
Volume
7
Issue
4
fYear
1986
fDate
4/1/1986 12:00:00 AM
Firstpage
252
Lastpage
253
Abstract
The equations of Dill for bleaching of photoactive compound in positive photoresists have been solved analytically in closed form. As an application, the contrast γ, has been evaluated explicitly in the absence of reflection from the substrate.
Keywords
Chemical engineering; Electron devices; Equations; Kinetic theory; Mathematics; Nonhomogeneous media; Optical films; Reflection; Resists; Substrates;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1986.26362
Filename
1486185
Link To Document