Title :
Exact solution of Dill´s model equations for positive photoresist kinetics
Author :
Babu, S.V. ; Barouch, E.
Author_Institution :
Clarkson University, Potsdam, NY
fDate :
4/1/1986 12:00:00 AM
Abstract :
The equations of Dill for bleaching of photoactive compound in positive photoresists have been solved analytically in closed form. As an application, the contrast γ, has been evaluated explicitly in the absence of reflection from the substrate.
Keywords :
Chemical engineering; Electron devices; Equations; Kinetic theory; Mathematics; Nonhomogeneous media; Optical films; Reflection; Resists; Substrates;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1986.26362
