Title :
3-D electrostatic hybrid element model for SAW interdigital transducers
Author :
Jerez-Hanckes, Carlos F. ; Laude, Vincent ; Nedelec, Jean-Claude ; Lardat, Raphael
Author_Institution :
Inst. Franche-Comte Electron. Mec. Thermique et Opt.-Sci. et Technol. (FEMTO-ST), Besancon
fDate :
3/1/2008 12:00:00 AM
Abstract :
In this work, the singular behavior of charges at corners and edges on the metallized areas in SAW transducers are investigated. In particular, it is demonstrated that a tensor product of the commonly used Tchebychev bases overestimates the singularities at corners, and, hence, it cannot be used in a proper boundary element method formulation. On the other hand, it is shown that a simple finite element method-like approach is impractical due to the enormous number of unknowns required to model the electrode´s large length-to-width ratio. These considerations are then used for defining a hybrid element model, which combines Tchebychev and linear polynomials over differently meshed domains. Such an approach is shown to suitably account for charge singularities while greatly reducing the number of unknowns. Results are obtained for isotropic and anisotropic substrates for non-periodic configurations.
Keywords :
interdigital transducers; surface acoustic wave transducers; 3-D electrostatic hybrid element model; SAW interdigital transducers; Tchebychev bases; Acoustic waves; Anisotropic magnetoresistance; Diffraction; Electrodes; Electrostatics; Finite element methods; Metallization; Polynomials; Surface acoustic waves; Transducers;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2008.693