DocumentCode :
1114129
Title :
The refractive index measurements of RF magnetron sputtered ZnO thin film on sapphire
Author :
Wu, Mu-Shiang ; Shiosaki, Tadashi ; Kawabata, Akira
Author_Institution :
Tatung Institute of Technology, Taipei, Taiwan
Volume :
23
Issue :
7
fYear :
1987
fDate :
7/1/1987 12:00:00 AM
Firstpage :
1105
Lastpage :
1107
Abstract :
Measurements were made of the refractive index of an RF magnetron sputtered ZnO thin film on sapphire. We compare the experimental results to theory when TE and TM guided waves propagate in the plane at an arbitrary angle with respect to the 
axis when the axis lies in the plane of the film. Care also should be taken when one uses 
-line spectroscopy to determine the refractive index of a film.
axis when the axis lies in the plane of the film. Care also should be taken when one uses -line spectroscopy to determine the refractive index of a film.Keywords :
Epitaxial growth; Optical planar waveguides; Optical refraction; Planar optical waveguide; Optical devices; Optical films; Optical refraction; Optical waveguides; Radio frequency; Refractive index; Sputtering; Substrates; Tellurium; Zinc oxide;
fLanguage :
English
Journal_Title :
Quantum Electronics, IEEE Journal of
Publisher :
ieee
ISSN :
0018-9197
Type :
jour
DOI :
10.1109/JQE.1987.1073471
Filename :
1073471
Link To Document :
