Interferometric, holographic techniques for Y-Ba-Cu-O film patterning

Author

Blyablin, A.A. ; Feoktistov, V.A. ; Kovalev, Alexander S. ; Korneev, V.V. ; Okhrimenko, V.N. ; Popov, A.M. ; Seleznev, B.V. ; Snigirev, O.V.

Author_Institution

Nucl. Phys. Res. Inst., Moscow, USSR

Volume

27

Issue

2

fYear

1991

fDate

3/1/1991 12:00:00 AM

Firstpage

2446

Lastpage

2448

Abstract

A laser single-pulse heating process was developed for the reversible patterning of YBCO thin films. The lattice, which consists of superconducting and nonsuperconducting lines, was fabricated in an area of 4*4 mm/sup 2/. The period of the lattice depended on the optical scheme and ranged between 1.5 and 40 mu m. A 1.06- mu m YAG laser, which provided 0.2-0.3 J /cm/sup 2/ power density at the film surface with a pulse duration of 10-15 ns and a coherence length close to 15 cm, was used for the patterning in the usual interferometric scheme with split beams. The result suggests that such a process, which utilizes holographic masks, can be a powerful technique for high-T/sub c/ thin-film device fabrication.

Keywords

barium compounds; high-temperature superconductors; holographic interferometry; laser beam applications; superconducting thin films; yttrium compounds; 1.06 micron; 1.5 to 40 micron; 10 to 15 ns; Y-Ba-Cu-O film; YAG laser; YAl5O12; high temperature superconductor; high-T/sub c/ thin-film device fabrication; holographic masks; holographic techniques; interferometric scheme; laser single-pulse heating process; optical scheme; pulse duration; reversible patterning; split beams; Heating; Holographic optical components; Holography; Lattices; Optical films; Optical interferometry; Power lasers; Superconducting films; Superconducting thin films; Yttrium barium copper oxide;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.133713

Filename

133713