Silicone Oil Contamination and Electrical Contact Resistance Degradation of Low-Force Gold Contacts

Author

Dickrell, Daniel J., III ; Dugger, Michael T.

Author_Institution

Dept. of Mech. & Aerosp. Eng., Florida Univ., Gainesville, FL

Volume

16

Issue

1

fYear

2007

Firstpage

24

Lastpage

28

Abstract

Hot-switched low-force gold electrical contact testing was performed using a nanomechanical test apparatus to ascertain the sensitivity of simulated microelectromechanical systems (MEMS) contact to silicone oil contamination. The observed cyclic contact resistance degradation was dependent on both closure rate and noncontact applied voltage. The decomposition of silicone oil from electrical arcing was hypothesized as the degradation mechanism

Keywords

arcs (electric); contact resistance; contamination; insulating oils; micromechanical devices; silicones; MEMS contact; contact resistance; electrical arcing; electrical degradation; low-force gold contacts; microelectromechanical systems contact; nanomechanical test apparatus; silicone oil contamination; Contact resistance; Contamination; Degradation; Electric resistance; Gold; Microelectromechanical systems; Micromechanical devices; Performance evaluation; Petroleum; System testing; Contact resistance; microelectromechanical systems (MEMS); silicones; surface contamination;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2006.885984

Filename

4099364