Title :
Silicone Oil Contamination and Electrical Contact Resistance Degradation of Low-Force Gold Contacts
Author :
Dickrell, Daniel J., III ; Dugger, Michael T.
Author_Institution :
Dept. of Mech. & Aerosp. Eng., Florida Univ., Gainesville, FL
Abstract :
Hot-switched low-force gold electrical contact testing was performed using a nanomechanical test apparatus to ascertain the sensitivity of simulated microelectromechanical systems (MEMS) contact to silicone oil contamination. The observed cyclic contact resistance degradation was dependent on both closure rate and noncontact applied voltage. The decomposition of silicone oil from electrical arcing was hypothesized as the degradation mechanism
Keywords :
arcs (electric); contact resistance; contamination; insulating oils; micromechanical devices; silicones; MEMS contact; contact resistance; electrical arcing; electrical degradation; low-force gold contacts; microelectromechanical systems contact; nanomechanical test apparatus; silicone oil contamination; Contact resistance; Contamination; Degradation; Electric resistance; Gold; Microelectromechanical systems; Micromechanical devices; Performance evaluation; Petroleum; System testing; Contact resistance; microelectromechanical systems (MEMS); silicones; surface contamination;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2006.885984
