DocumentCode :
1115433
Title :
Analytic potential expression of a three-plane parallel-electrode system with special apertures
Author :
Yokota, Hideo ; Kishi, Tohru
Author_Institution :
University of Osaka Prefecture, Osaka, Japan
Volume :
34
Issue :
2
fYear :
1987
fDate :
2/1/1987 12:00:00 AM
Firstpage :
486
Lastpage :
489
Abstract :
Potential distributions in all the space of a two-dimensional lens consisting of three parallel plates of symmetrical construction and specific apertures are obtained analytically by finding special transformation functions between the real lens space and the corresponding imaginary one. The functions contain two arbitrary constants 
and 
connecting the inner aperture 2Yi , the outer one 2Yo , and the distance 
between the electrodes. The distance is given by 
= 
and 
are functions of the ratio 
only. Therefore, the transformation functions can be applied to specific combinations of Yin , Yon , and . Yin = Yon = 0.6789884 is obtained for = 0.1851789. As an example, a full mapping of the lines of potential and electric field for 
, and 
is shown. In this case one obtains Yin = 0.6406773 and Yon = 0.5507097.
and connecting the inner aperture 2Y between the electrodes. The distance is given by = and are functions of the ratio only. Therefore, the transformation functions can be applied to specific combinations of Y . Y = 0.1851789. As an example, a full mapping of the lines of potential and electric field for , and is shown. In this case one obtains YKeywords :
Apertures; Electric potential; Electrodes; Geometrical optics; Image analysis; Ion implantation; Joining processes; Laplace equations; Lenses; Pressing;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1987.22950
Filename :
1486661
Link To Document :
