DocumentCode
1115759
Title
Development of method to model surface of reflowed square microlens for image sensor
Author
Kim, S.-M. ; Choi, M. ; Kim, S. ; Lim, J. ; Kang, S.
Author_Institution
Yonsei Univ., Seoul
Volume
44
Issue
7
fYear
2008
Firstpage
492
Lastpage
493
Abstract
A numerical method to model the surface of a reflowed square micro- lens is proposed to improve the simulation accuracy of photosensitivity for an image sensor. To verify the proposed method, a reflowed square microlens with base size of 4.8 x 4.8 mum and sag height of 1.55 mum was fabricated and the modelling accuracy was compared and analysed.
Keywords
image sensors; microlenses; image sensor; photosensitivity; reflowed square microlens;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20080351
Filename
4479562
Link To Document