DocumentCode
1115791
Title
Implementation of optical interconnections for VLSI
Author
Wu, Wennie H. ; Bergman, Larrya ; Johnston, Alan R. ; Guest, Clark C. ; Esener, Sadik C. ; Yu, Paul K. L. ; Feldman, Michael R. ; Lee, Sing H.
Author_Institution
California Institute of Technology, Pasadena, CA
Volume
34
Issue
3
fYear
1987
fDate
3/1/1987 12:00:00 AM
Firstpage
706
Lastpage
714
Abstract
This paper reports on the progress in implementing optical interconnections for VLSI. Four areas are covered: 1) the holographic optical element (HOE), 2) the laser sources, 3) the detectors and associated circuits forming an optically addressed gate, and 4) interconnection experiments in which five gates are actuated from one source. A laser scanner system with a resolution of 12 µm × 20 µm has been utilized to generate the HOE´s. Diffraction efficiency of the HOE and diffracted spot size have been measured. Stock lasers have been modified with a high-frequency package for interconnect experiments, and buried heterostructure fabrication techniques have been pursued. Measurements have been made on the fabricated photodetectors to determine dark current, responsivity and response time. The optical gates and the overall chip have been driven successfully with an input light beam, as well as with the optical signal interconnected through the one to five hologram.
Keywords
Holographic optical components; Holography; Integrated circuit interconnections; Optical device fabrication; Optical diffraction; Optical interconnections; Packaging; Semiconductor device measurement; Size measurement; Very large scale integration;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1987.22983
Filename
1486694
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