Title :
Fabrication and Characterization of Benzocyclobutene Optical Waveguides by UV Pulsed-Laser Illumination
Author :
Chen, Liang-Yin ; Tsai, Wan-Shao ; Hsu, Wen-Hao ; Chen, Kuan-Yu ; Wang, Way-Seen
Author_Institution :
Nat. Taiwan Univ., Taipei
fDate :
4/1/2007 12:00:00 AM
Abstract :
Buried-type benzocyclobutene (BCB) optical waveguides fabricated by UV pulsed-laser illumination are proposed and comprehensively characterized in this paper. The fabrication process is greatly simplified as compared to conventional dry-etched ridge-type BCB waveguides. The measured propagation loss at 1548 nm is as low as 0.6 dB/cm due to the buried waveguide structure. And the produced refractive index change is dependent upon the number of laser shots such that single-mode waveguides with different mode sizes can be tailored for efficient coupling. Furthermore, rigorous analyses of surface damage threshold, rms roughness, and chemical characteristics under different illumination conditions are presented to illustrate the design considerations and the chemical mechanism of the UV-induced BCB waveguides
Keywords :
integrated optics; laser beam effects; laser materials processing; optical fabrication; optical losses; optical polymers; optical waveguides; photochemistry; refractive index; surface roughness; ultraviolet radiation effects; 1548 nm; benzocyclobutene optical waveguides; buried-type waveguides; chemical characteristics; integrated optical fields; laser shots; polymer materials; propagation loss; refractive index change; single-mode waveguides; surface damage threshold; surface roughness; ultraviolet pulsed-laser illumination; waveguide fabrication; Chemical analysis; Lighting; Loss measurement; Optical device fabrication; Optical pulses; Optical refraction; Optical variables control; Optical waveguides; Propagation losses; Refractive index; Benzocyclobutene (BCB); excimer lasers; optical polymers; optical waveguides;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.2006.890400
