Development of nanostructures for thermoelectric microgenerators using ion-track lithography

A novel fabrication process for nanostructures for thermoelectric microgenerators, based on a combination of a traditional silicon micro- fabrication techniques, electroplating and submicron ion-track nano- lithography, is discussed. Ion-track etched polyimide nanotemplates (30-80 nm pore diameters) are used to grow Bi₂Te₃ nanowires by electroplating. The Bi₂Te₃ film´s microstructural and thermoelectric properties are reported.