DocumentCode :
1118091
Title :
Electrical test of multichip substrates
Author :
Economikos, Laertis ; Morrison, Thomas ; Crnic, Frank
Author_Institution :
East Fishkill Lab., IBM Corp., Hopewell Junction, NY, USA
Volume :
17
Issue :
1
fYear :
1994
fDate :
2/1/1994 12:00:00 AM
Firstpage :
56
Lastpage :
61
Abstract :
For complex substrates, electrical test is a fundamental element of cost control and quality assurance. Test technologies for multi-chip substrate applications must handle densely wired products with small, tightly spaced contact features. Detection of latent defects or near defects is crucial in meeting reliability objectives. Cluster probe resistance. Capacitance, and electron beam approaches have all been applied to substrate electrical test. IBM´s latent opens test is used to screen opens and near opens in thick and thin films and to characterize the interface of bonded metals in interconnection technologies. Key substrate test technology elements include: buckling beam top surface and spring probe bottom surface contact schemes, optical mapping and alignment techniques, automated product and data logistics, and the “full cluster” tester which contacts over 23000 test points at a single time
Keywords :
capacitance measurement; electric resistance measurement; electron beam testing; integrated circuit testing; multichip modules; substrates; thick film circuits; thin film circuits; MCM substrate testing; automated product logistics; bonded metals interface; buckling beam top surface contact scheme; electrical test; full cluster tester; interconnection technologies; latent opens test; multichip substrates; optical alignment techniques; optical mapping; spring probe bottom surface contact scheme; thick film opens; thin film opens; Automatic testing; Capacitance; Contacts; Costs; Electric resistance; Electron beams; Probes; Quality assurance; Space technology; Transistors;
fLanguage :
English
Journal_Title :
Components, Packaging, and Manufacturing Technology, Part B: Advanced Packaging, IEEE Transactions on
Publisher :
ieee
ISSN :
1070-9894
Type :
jour
DOI :
10.1109/96.296431
Filename :
296431
Link To Document :
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