DocumentCode :
1118737
Title :
IIIB-4 a super self-aligned high-speed CMOS technology
Author :
Tzu-Yin Chiu ; Voshchenkov, A.M. ; Chin, Gillian M. ; Lee, K.F. ; Hanson, R.C. ; Morris, M.D.
Volume :
34
Issue :
11
fYear :
1987
fDate :
11/1/1987 12:00:00 AM
Firstpage :
2366
Lastpage :
2367
Keywords :
CMOS technology; Delay; Fabrication; MOS devices; Parasitic capacitance; Plasma chemistry; Plasma devices; Plasma materials processing; Plasma temperature; Ring oscillators;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1987.23271
Filename :
1486982
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1118737
