Title :
IIIB-8 UPMOS—A new approach to submicrometer VLSI
Author :
Foo, P.D. ; Liu, Richard ; Orlowsky, K.J. ; Hillenius ; Lynch, W.T.
fDate :
11/1/1987 12:00:00 AM
Keywords :
Annealing; Capacitance; Contact resistance; Cutoff frequency; Electrical resistance measurement; Etching; Ion implantation; MOSFET circuits; Silicon; Very large scale integration;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1987.23275
