DocumentCode

1118933

Title

IVB-6 hot-carrier reliability of trench transistor

Author

Aur, S. ; Ping Yang

Volume

34

Issue

11

fYear

1987

fDate

11/1/1987 12:00:00 AM

Firstpage

2374

Lastpage

2374

Keywords

Circuits; Compressive stress; Crystallography; Degradation; Hot carriers; Silicon compounds; Substrates; Tensile stress; Very large scale integration; Yttrium;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1987.23289

Filename

1487000