DocumentCode
1118983
Title
VA-1 Submicrometer self-aligned gate GaAs E/D MESFET´s with VLSI compatible threshold voltage uniformity
Author
Tan, K.L. ; Chung, Hyun Kyu ; Chen, C.H.
Volume
34
Issue
11
fYear
1987
fDate
11/1/1987 12:00:00 AM
Firstpage
2375
Lastpage
2375
Keywords
FETs; Gallium arsenide; Impurities; MESFETs; Molecular beam epitaxial growth; Optical buffering; Optical crosstalk; Substrates; Threshold voltage; Very large scale integration;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1987.23294
Filename
1487005
Link To Document