DocumentCode :
1119005
Title :
VA-4 Shannon contact formation on GaAs with interfacial nitrogen incorporation
Author :
Zhang, L.C. ; Cheung, S.K. ; Cheung, N.W.
Volume :
34
Issue :
11
fYear :
1987
fDate :
11/1/1987 12:00:00 AM
Firstpage :
2376
Lastpage :
2376
Keywords :
Annealing; Avalanche breakdown; Breakdown voltage; Capacitance; Contacts; Gallium arsenide; MESFETs; Nitrogen; Schottky diodes; Tin;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1987.23296
Filename :
1487007
Link To Document :
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