Virtual control - a virtual cluster tool for testing and verifying a cluster tool controller and a scheduler

Author

Joo, Yong-jae ; Lee, Tae-Eog

Author_Institution

Dept. of Ind. Eng., Korea Adv. Inst. of Sci. & Technol., Daejon, South Korea

Volume

11

Issue

3

fYear

2004

Firstpage

33

Lastpage

49

Abstract

In this paper, a systematic practice for verifying a scheduler and a CTC using a virtual cluster tool (VCT) model are presented, which emulates the operational behavior of a real cluster tool with high fidelity. The model architecture and modeling strategies of the VCT were also explained. This paper also presented the use of a formal model-based automatic error-detection technique and discussed experiences of verifying a real cluster tool controller using the VCT.

Keywords

control engineering computing; materials handling; process control; scheduling; semiconductor device manufacture; virtual manufacturing; cluster tool controller; formal model-based automatic error-detection technique; scheduler verification; virtual cluster tool; virtual control; Automatic control; Communication system control; Control systems; Delay; Job shop scheduling; Process control; Robot kinematics; Robotics and automation; Service robots; Testing;

fLanguage

English

Journal_Title

Robotics & Automation Magazine, IEEE

Publisher

ieee

ISSN

1070-9932

Type

jour

DOI

10.1109/MRA.2004.1337825

Filename

1337825