Title :
VIB-2 Hot-carrier-induced degradation in MOSFET´s studied by recovery temperature spectroscopy (RTS)
Author :
Saitoh, Masatoshi ; Kinugawa, M. ; Hashimoto, Koji
fDate :
11/1/1987 12:00:00 AM
Keywords :
Annealing; Charge carrier processes; Chemicals; Hot carriers; MOSFET circuits; Resistance heating; Spectroscopy; Stress; Temperature; Thermal degradation;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1987.23317
