Title :
VIB-7 Optimization of LDD MOSFET´s using coupled 2-D simulations
Author :
Husain, Anis ; Mathur, R. ; Wu, Shiqian
fDate :
11/1/1987 12:00:00 AM
Keywords :
Anisotropic magnetoresistance; Boron; CMOS technology; Capacitance; Computational modeling; Computer simulation; Degradation; Etching; Implants; Superconductivity;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1987.23322
