System integration of optical devices and analog CMOS amplifiers

Author

Braß, Eckhard ; Hilleringmann, Ulrich ; Schumacher, Klaus

Author_Institution

AG Mikroelektronik, Dortmund Univ., Germany

Volume

29

Issue

8

fYear

1994

fDate

8/1/1994 12:00:00 AM

Firstpage

1006

Lastpage

1010

Abstract

Monolithic system integration of optical components, photodetectors, and analog transimpedance CMOS amplifiers is presented. An advanced SWAMI LOCOS technique, based on a submicron CMOS process is applied. Different optical devices including waveguides, beam splitters, interferometers and mirrors have been integrated using this technique. The optical system consists of a SiON layer deposited on 2-μm oxide. The waveguides are made of structured SiO₂ layers on top of the SiON layer. Leaky wave or butt coupled photodiodes and phototransistors are used as light detectors. The photocurrents are amplified by low-noise CMOS transimpedance amplifiers with high sensitivity. They were designed for a large dynamic range of photocurrents together with short recovery times and low noise. Their reliability and yield were optimized with new CAD tools

Keywords

CMOS integrated circuits; analogue processing circuits; elemental semiconductors; integrated optics; light interferometers; linear integrated circuits; mirrors; optical waveguides; photodetectors; silicon; silicon compounds; 2 micron; CAD tools; SWAMI LOCOS technique; SiO₂-SiON-SiO₂-Si; SiO₂-SiON-SiO₂-Si structure; analog CMOS amplifiers; beam splitters; butt coupled photodiodes; interferometers; leaky wave photodiodes; mirrors; monolithic system integration; optical components; optical waveguides; photodetectors; phototransistors; recovery times; reliability; submicron CMOS process; transimpedance CMOS amplifiers; yield; CMOS process; Interferometers; Mirrors; Optical amplifiers; Optical beam splitting; Optical devices; Optical waveguides; Photoconductivity; Photodetectors; Semiconductor optical amplifiers;

fLanguage

English

Journal_Title

Solid-State Circuits, IEEE Journal of

Publisher

ieee

ISSN

0018-9200

Type

jour

DOI

10.1109/4.297714

Filename

297714