Effects of downstream magnetic field collimation on ion behavior in electron cyclotron resonance microwave plasma

Author

Okuno, Yoshihiro ; Ohtsu, Yasunori ; Fujita, Hiroharu

Author_Institution

Dept. of Electr. Eng., Saga Univ., Japan

Volume

22

Issue

3

fYear

1994

fDate

6/1/1994 12:00:00 AM

Firstpage

253

Lastpage

259

Abstract

Effects of a magnetic held collimation on ion behavior in the downstream region of an electron cyclotron resonance (ECR) plasma device are clarified experimentally using a directional ion energy analyzer. The drift energy and its spread of the ion beam observed in the downstream region decrease and the beam temperature increases with the collimating magnetic flux density. Then, the ion temperature measured perpendicular to the axis of the plasma stream slightly decreases. The ion beam is found to be almost parallel to the magnetic field lines, that is, the beam tends to be collimated

Keywords

discharges (electric); high-frequency discharges; ion beams; magnetic field effects; plasma devices; plasma diagnostics; plasma temperature; plasma-beam interactions; directional ion energy analyzer; downstream magnetic field collimation; drift energy; electron cyclotron resonance microwave plasma; ion behavior; ion temperature; magnetic field lines; plasma device; Collimators; Ion beams; Magnetic devices; Magnetic field measurement; Magnetic flux; Magnetic resonance; Plasma devices; Plasma measurements; Plasma temperature; Temperature measurement;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.297875

Filename

297875