• DocumentCode
    1120973
  • Title

    Accurate models of collisions in glow discharge simulations

  • Author

    Hitchon, W.N.G. ; Parker, G.J. ; Lawler, J.E.

  • Author_Institution
    Eng. Res. Center for Plasma-Aided Manuf., Wisconsin Univ., Madison, WI, USA
  • Volume
    22
  • Issue
    3
  • fYear
    1994
  • fDate
    6/1/1994 12:00:00 AM
  • Firstpage
    267
  • Lastpage
    274
  • Abstract
    Very detailed, self-consistent kinetic glow discharge simulations are used to examine the effect of various models of collisional processes. The effects of allowing anisotropy in elastic electron collisions with neutral atoms instead of using the momentum transfer cross-section, the effects of using an isotropic distribution in inelastic electron-atom collisions, and the effects of including a Coulomb electron-electron collision operator are all described. It is shown that changes in any of the collisional models, especially the second and third described above, can make a profound difference in the simulation results. This confirms that many discharge simulations have great sensitivity to the physical and numerical approximations used. Our results reinforce the importance of using a kinetic theory approach with highly realistic models of various collisional processes
  • Keywords
    digital simulation; glow discharges; plasma collision processes; plasma kinetic theory; plasma simulation; Coulomb electron-electron collision operator; anisotropy; collisional models; collisional processes; elastic electron collisions; highly realistic models; inelastic electron-atom collisions; isotropic distribution; kinetic theory; momentum transfer cross-section; neutral atoms; self-consistent kinetic glow discharge simulations; simulation; Anisotropic magnetoresistance; Electrons; Glow discharges; Kinetic theory; Numerical simulation; Physics; Plasma materials processing; Plasma sources; Predictive models; Testing;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.297877
  • Filename
    297877