DocumentCode :
1121431
Title :
Comparison of YBCO thin films and SQUIDs prepared by ion beam deposition and RF and DC unbalanced magnetron sputtering
Author :
Foley, C.P. ; Filipczuk, S.W. ; Savvides, N. ; Dart, D.L. ; Müller, K.H. ; Macfarlane, J.C.
Author_Institution :
CSIRO, Sydney, NSW, Australia
Volume :
27
Issue :
2
fYear :
1991
fDate :
3/1/1991 12:00:00 AM
Firstpage :
3036
Lastpage :
3039
Abstract :
Results obtained with DC SQUIDs prepared by ion beam deposited films of YBa2Cu3Ox on substrates of (100) yttria stabilized zirconia (YSZ) have been previously reported. Superconducting films have subsequently been deposited by DC and RF unbalanced magnetron sputtering on various substrates including oriented and unoriented YSZ and lithium niobate. Details of films prepared by a different method are presented. Also reported are preliminary results on polycrystalline DC SQUIDs and an attempt to relate the SQUID properties with the morphology and film structure in each case. The implications of off-stoichiometry on film properties are discussed. It is shown that there is little difference between ion beam, RF, and DC unbalanced magnetron sputtering for the production of superconducting YBCO films providing the film is stoichiometric to better than 5%. Films with barium deficiencies over 7% are insulating. The advantage of one deposition method over the other is that RF unbalanced magnetron sputtering does not deplete the target of barium as rapidly as the other techniques. Targets can last up to three times longer
Keywords :
SQUIDs; barium compounds; high-temperature superconductors; sputter deposition; sputtered coatings; superconducting thin films; yttrium compounds; SQUIDs; YBaCuO; deposition method; film properties; high-temperature superconductors; ion beam deposition; morphology; off-stoichiometry; unbalanced magnetron sputtering; Ion beams; Radio frequency; SQUIDs; Sputtering; Substrates; Superconducting films; Superconducting magnets; Superconducting thin films; Transistors; Yttrium barium copper oxide;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/20.133849
Filename :
133849
Link To Document :
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