DocumentCode
1121482
Title
The correct equivalent box representation for the buried layer of BC MOSFET´s in terms of the implantation parameters
Author
Karmalkar, S. ; Bhat, K.N.
Author_Institution
Indian Institute of Technology, Madras, India
Volume
8
Issue
10
fYear
1987
Firstpage
457
Lastpage
459
Abstract
From the charge-voltage considerations, it is shown that the Gaussian-implanted profile of buried layers can be correctly represented by an equivalent box. The paper also shows that the average doping and the depth of this box can be obtained directly from a knowledge of the implantation parameters.
Keywords
Capacitance; Channel bank filters; Design automation; Doping profiles; Gaussian processes; MOSFET circuits; Parameter extraction; Very large scale integration; Voltage;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1987.26693
Filename
1487243
Link To Document