• DocumentCode
    1121482
  • Title

    The correct equivalent box representation for the buried layer of BC MOSFET´s in terms of the implantation parameters

  • Author

    Karmalkar, S. ; Bhat, K.N.

  • Author_Institution
    Indian Institute of Technology, Madras, India
  • Volume
    8
  • Issue
    10
  • fYear
    1987
  • Firstpage
    457
  • Lastpage
    459
  • Abstract
    From the charge-voltage considerations, it is shown that the Gaussian-implanted profile of buried layers can be correctly represented by an equivalent box. The paper also shows that the average doping and the depth of this box can be obtained directly from a knowledge of the implantation parameters.
  • Keywords
    Capacitance; Channel bank filters; Design automation; Doping profiles; Gaussian processes; MOSFET circuits; Parameter extraction; Very large scale integration; Voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1987.26693
  • Filename
    1487243