TES Development for a Frequency Selective Bolometer Camera

We discuss the development, at Argonne National Laboratory (ANL), of a four-pixel camera with four spectral channels centered at 150, 220, 270, and 360 GHz. The scientific motivation involves photometry of distant dusty galaxies located by Spitzer and SCUBA, as well as the study of other millimeter-wave sources such as ultra-luminous infrared galaxies, the Sunyaev-Zeldovich effect in clusters, and galactic dust. The camera incorporates Frequency Selective Bolometer (FSB) and superconducting Transition-Edge Sensor (TES) technology. The current generation of TES devices we examine utilizes proximity effect superconducting bilayers of Mo/Au, Ti, or Ti/Au as TESs, located along with frequency selective absorbing structures on silicon nitride membranes. The detector incorporates lithographically patterned structures designed to address both TES device stability and detector thermal transport concerns. The membrane is not perforated, resulting in a detector which is comparatively robust mechanically. In this paper, we report on the development of the superconducting bilayer TES technology, the design and testing of the detector thermal transport and device stability control structures, optical and thermal test results, and the use of new materials.