YBCO Nanobridges: Simplified Fabrication Process by Using a Ti Hard Mask

Author

Papari, G. ; Carillo, Franco ; Born, Detlef ; Bartoloni, L. ; Gambale, E. ; Stornaiuolo, D. ; Pingue, P. ; Beltram, F. ; Tafuri, Francesco

Author_Institution

Coherentia-INFM-CNR, Univ. Degli Studi di Napoli Federico II, Naples, Italy

Volume

19

Issue

3

fYear

2009

fDate

6/1/2009 12:00:00 AM

Firstpage

183

Lastpage

186

Abstract

An innovative fabrication procedure has been developed to obtain YBa₂Cu₃O_7-x (YBCO) nanobridges from c-axis oriented films. The novelty regards the use of a thin titanium mask used in the patterning process. The use of the Ti makes simpler the fabrication procedure guaranteeing high quality devices, as demonstrated by transport measurements. Critical temperatures and critical current densities scale with the width of the microbridge down to 200 nm in agreement with most results available in literature. The actual properties of the devices, performances, yield and reproducibility, along with an accurate control on doping, may allow the use of these micro-bridges for nanoscale experiments.

Keywords

barium compounds; critical current density (superconductivity); nanopatterning; nanostructured materials; superconducting transition temperature; yttrium compounds; YBa₂Cu₃O_7-x; c-axis oriented films; critical temperatures; doping; hard mask; nanobridges; High-temperature superconductors; nanotechnology; superconducting device fabrication; superconducting device measurements;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/TASC.2009.2019023

Filename

5153053