• DocumentCode
    1122844
  • Title

    GaAs single-mode rib waveguides with reactive ion-etched totally reflecting corner mirrors

  • Author

    Buchmann, Peter ; Kaufmann, Hans

  • Author_Institution
    Swiss Federal Institute of Technology, Zurich, Switzerland
  • Volume
    3
  • Issue
    4
  • fYear
    1985
  • fDate
    8/1/1985 12:00:00 AM
  • Firstpage
    785
  • Lastpage
    788
  • Abstract
    The fabrication and optical properties of reactive ion-etched, totally reflecting mirrors for single-mode GaAs rib waveguides are described. Low loss and orientation independance make the device useful in integrated optics, in order to increase packing density and to facilitate waveguide to fiber coupling. Results of displacement sensitivity calculations are also shown.
  • Keywords
    Integrated optics; Optical waveguides; Etching; Gallium arsenide; Integrated optics; Mirrors; Optical coupling; Optical device fabrication; Optical sensors; Optical waveguides; Resists; Semiconductor waveguides;
  • fLanguage
    English
  • Journal_Title
    Lightwave Technology, Journal of
  • Publisher
    ieee
  • ISSN
    0733-8724
  • Type

    jour

  • DOI
    10.1109/JLT.1985.1074269
  • Filename
    1074269
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1122844