Novel Microrobots and Micromotors Using Lorentz Force Driven Linear Microactuators Based on Polymer Magnets

Author

Feldmann, M. ; Büttgenbach, S.

Author_Institution

Tech. Univ. of Braunschweig, Braunschweig

Volume

43

Issue

10

fYear

2007

Firstpage

3891

Lastpage

3895

Abstract

This paper reports on the development of several novel microelectromechanical systems (MEMS) machines based on linear Lorentz force actuators. These were monolithically fabricated and include micromachined polymer magnets. Polymer magnets allow a highly flexible definition of magnetic areas, arbitrary shape, and properties. By combining these linear actuators with mechanical compliant structures using Epon SU-8, we were able to build in-plane and out-of-plane micropositioners, micromotors, and microgrippers.

Keywords

grippers; microactuators; micromotors; micropositioning; microrobots; permanent magnet motors; permanent magnets; Epon SU-8; Lorentz force driven linear microactuators; in-plane micropositioners; mechanical compliant structures; microelectromechanical system machines; microgrippers; micromachined polymer magnets; micromotors; microrobots; out-of-plane micropositioners; Hydraulic actuators; Lorentz covariance; Magnetic properties; Magnets; Microactuators; Microelectromechanical systems; Micromechanical devices; Micromotors; Polymers; Shape; Microactuators; micromotors; microrobots; polymermagnets;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2007.897052

Filename

4303199