Title :
Oxide-Layer Thickness Effect for Surface Roughness Using Low-Pressure Arc
Author :
Iwao, Toru ; Inagaki, Yoshihiro ; Sato, Atsushi ; Yumoto, Motoshige
Author_Institution :
Graduate Sch. ofEngineering, Musashi Inst. of Technol., Tokyo
Abstract :
Low-pressure arc cleaning is a process for removing an oxide layer. Currently, chemical and mechanical means are typically used to remove such layers. However, both methods present difficulties such as a liquid waste, dust, and noise. Regarding the low-pressure arc cleaning, waste comes from one source: the oxide layer. In addition, the cathode spot has very high temperatures that are sufficient to remove the oxide layer. This paper describes the removal of the nanometer-thick oxide layer from a thin metal plate. An oxide layer of 27-157 nm was removed, thereby, obtaining a smooth surface whose respective arithmetical mean height (Ra) and average length of an outline curve element (R sm) are 0.04 and 6.4 mum. In that case, Ra and R sm increased with an increasing oxide-layer thickness at 397-1680 nm. Those results depend on the oxide-layer thickness. Therefore, although the surface is cratered and rough after a cathode-spot treatment on the chemical oxide layer (6.7 nm), a smooth surface is obtainable after the cathode-spot treatment on the thermal oxide layer (27, 66, and 157 nm). Surface roughness depends on the processing time to produce one crater, which depends on the oxide-layer thickness
Keywords :
Auger electron spectra; optical microscopy; plasma materials processing; stainless steel; surface cleaning; surface roughness; vacuum arcs; 27 to 157 nm; 397 to 1680 nm; 6.7 nm; Auger electron spectroscopy; SUS430 stainless steel; arithmetical mean height; cathode-spot treatment; laser microscopy; low-pressure arc; nanometer-thick oxide layer removal; outline curve element average length; oxide-layer thickness; smooth surface; surface roughness; thin metal plate; vacuum arc cleaning; Cathodes; Chemicals; Cleaning; Electrodes; Rough surfaces; Steel; Surface roughness; Surface treatment; Thermal spraying; Vacuum arcs; Cathode spots; low-pressure arc; oxide layer; processing time; smooth surface; vacuum arc;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2006.877745