Title :
Uniform Long-Slit Microwave Plasma Generation From a Longitudinal-Section Electric Mode Coupling
Author :
Kim, Hae Jin ; Choi, Jin Joo ; Hong, Jung Mi
Author_Institution :
Kwangwoon Univ., Seoul
Abstract :
A stable uniform long-slit atmospheric argon plasma is produced by coupling a longitudinal-section electric (LSE) mode in a dielectric-loaded rectangular waveguide. The microwave-induced plasma discharge system consists of a 2.45-GHz microwave source, a circulator, a three-stub tuner, a transformer, and a tapered rectangular waveguide loaded with two dielectric slabs. A uniform 98-mm-long atmospheric argon plasma is observed at a relatively low microwave power level of 350 W and a gas flow rate of 10-15 L/min
Keywords :
argon; dielectric-loaded waveguides; high-frequency discharges; plasma filled waveguides; plasma sources; rectangular waveguides; 2.45 GHz; 350 W; 98 mm; Ar; atmospheric argon plasma; circulator; dielectric-loaded rectangular waveguide; long-slit microwave plasma generation; longitudinal-section electric mode coupling; microwave source; microwave-induced plasma discharge; three-stub tuner; transformer; Argon; Atmospheric waves; Couplings; Dielectrics; Fault location; Microwave generation; Plasma sources; Plasma stability; Plasma waves; Rectangular waveguides; Atmospheric plasma discharge; dielectric-loaded rectangular waveguide;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2006.878995
