• DocumentCode
    1125430
  • Title

    Special issue on Advance in Plasma Processing for Semiconductor Manufacturing

  • Volume
    36
  • Issue
    2
  • fYear
    2008
  • fDate
    4/1/2008 12:00:00 AM
  • Firstpage
    559
  • Lastpage
    559
  • Abstract
    Provides notice of upcoming special issue(s) of interest to practitioners and researchers.
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2008.922662
  • Filename
    4484177
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1125430