DocumentCode
1125516
Title
In situ preparation of Y1Ba2Cu3O 7-x thin films deposited by ion beam sputtering: preliminary results
Author
Barbanera, S. ; Murtas, F. ; Scopa, L. ; Boffa, V. ; Paternò, G. ; Montone, A. ; Antisari, M.Vittori
Author_Institution
Istituto di Elettronica dello Stato Solido, CNR, Rome, Italy
Volume
27
Issue
2
fYear
1991
fDate
3/1/1991 12:00:00 AM
Firstpage
2522
Lastpage
2524
Abstract
Thin films of the high-temperature superconductor Y1Ba 2Cu3O7-x have been grown in situ by ion beam sputtering from metal binary alloys. The metal binary alloys used were YCu and BaCu. The correct composition of the deposited film was obtained by adjusting the position of the targets with respect to the ion beam. The films were deposited onto heated SrTiO3 substrates in oxygen partial pressure. After deposition the samples were slowly cooled to room temperature with a short step at 450°C. The films did not need any further annealing after deposition and showed superconducting properties
Keywords
barium compounds; high-temperature superconductors; sputter deposition; sputtered coatings; superconducting thin films; yttrium compounds; Y1Ba2Cu3O7-x; annealing; high-temperature superconductor; ion beam sputtering; metal binary alloys; room temperature; superconducting properties; targets; Conductive films; High temperature superconductors; Ion beams; Magnetic films; Plasma properties; Sputtering; Substrates; Superconducting films; Superconducting thin films; Vacuum technology;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.133989
Filename
133989
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