Title :
In situ preparation of Y1Ba2Cu3O 7-x thin films deposited by ion beam sputtering: preliminary results
Author :
Barbanera, S. ; Murtas, F. ; Scopa, L. ; Boffa, V. ; Paternò, G. ; Montone, A. ; Antisari, M.Vittori
Author_Institution :
Istituto di Elettronica dello Stato Solido, CNR, Rome, Italy
fDate :
3/1/1991 12:00:00 AM
Abstract :
Thin films of the high-temperature superconductor Y1Ba 2Cu3O7-x have been grown in situ by ion beam sputtering from metal binary alloys. The metal binary alloys used were YCu and BaCu. The correct composition of the deposited film was obtained by adjusting the position of the targets with respect to the ion beam. The films were deposited onto heated SrTiO3 substrates in oxygen partial pressure. After deposition the samples were slowly cooled to room temperature with a short step at 450°C. The films did not need any further annealing after deposition and showed superconducting properties
Keywords :
barium compounds; high-temperature superconductors; sputter deposition; sputtered coatings; superconducting thin films; yttrium compounds; Y1Ba2Cu3O7-x; annealing; high-temperature superconductor; ion beam sputtering; metal binary alloys; room temperature; superconducting properties; targets; Conductive films; High temperature superconductors; Ion beams; Magnetic films; Plasma properties; Sputtering; Substrates; Superconducting films; Superconducting thin films; Vacuum technology;
Journal_Title :
Magnetics, IEEE Transactions on
