Title :
Bohm velocity with a two-temperature distribution of negative particles
Author :
Boswell, R.W. ; Lichtenberg, Allan J. ; Vender, David
Author_Institution :
Plasma Res. Lab., Australian Nat. Univ., Canberra, ACT, Australia
fDate :
4/1/1992 12:00:00 AM
Abstract :
A one-dimensional simulation of a low-pressure RF-driven discharge is used to verify the theoretical prediction of the Bohm velocity of ions at the sheath edge for a two-temperature electron distribution. Simulation results indicate that the Bohm velocity is geared to the cooler species, provided that it contains most of the electrons. A similar comparison is performed for an electronegative plasma
Keywords :
high-frequency discharges; plasma kinetic theory; plasma sheaths; plasma simulation; Bohm velocity; electronegative plasma; ions; low-pressure RF-driven discharge; negative particles; one-dimensional simulation; sheath edge; two-temperature electron distribution; Electrons; Mechanical factors; Plasma density; Plasma measurements; Plasma sheaths; Plasma simulation; Plasma temperature; Predictive models; Probes; Temperature distribution;
Journal_Title :
Plasma Science, IEEE Transactions on
