Title :
The space-time-averaging procedure and modeling of the RF discharge II. Model of collisional low-pressure RF discharge
Author :
Kaganovich, Igor D. ; Tsendin, Lev D.
Author_Institution :
Phys. Tech. Dept., Leningrad State Tech. Univ., St. Petersburg, Russia
fDate :
4/1/1992 12:00:00 AM
Abstract :
For pt.I see ibid., vol.19, p.130-40 (1991). A self-consistent equations system for the low-pressure RF discharge is formulated and qualitatively analyzed. If the plasma and sheath dimensions exceed the electron-energy relaxation length, a simple spatially averaged kinetic equation can be derived that resembles the conventional one for the local case. Since the energy-diffusion coefficient for the slow electrons that are trapped by the average electric field in the discharge center is small, the distribution function slope decreases significantly with the energy growth. Analytic estimates are derived and reasonable agreement with the experiments of Godyak (1976, 1979, 1986, 1990) is obtained
Keywords :
high-frequency discharges; plasma collision processes; plasma kinetic theory; plasma sheaths; plasma simulation; plasma transport processes; collisional low-pressure RF discharge; distribution function slope; electric field; electron-energy relaxation length; energy growth; energy-diffusion coefficient; modeling; plasma dimensions; self-consistent equations system; sheath dimensions; space-time-averaging procedure; spatially averaged kinetic equation; trapped slow electrons; Distribution functions; Electron traps; Equations; Helium; Ionization; Kinetic theory; Plasma density; Plasma properties; Plasma sheaths; Radio frequency;
Journal_Title :
Plasma Science, IEEE Transactions on
