DocumentCode
1127177
Title
New submicron MOSFET structural concept for suppression of hot carriers
Author
Tasch, A.F. ; Shin, Hae-Young ; Maziar, C.M.
Author_Institution
Microelectron. Res. Center, Texas Univ., Austin, TX, USA
Volume
26
Issue
1
fYear
1990
Firstpage
39
Lastpage
41
Abstract
A new structural concept for submicron MOSFETs is described for substantially suppressing adverse hot carrier effects. This structure differs from the well known LDD type of structure in that it has a more lightly doped n-type region located behind a very shallow, steeply profiled source/drain junction.
Keywords
hot carriers; insulated gate field effect transistors; hot carrier suppression; lightly doped n-type region; shallow source/drain junction; steeply profiled source/drain junction; structural concept; submicron MOSFET;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19900026
Filename
44862
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