• DocumentCode
    1128056
  • Title

    Fluorine doping and etching reactions of freon 12 in optical fiber manufacture

  • Author

    Marshall, Andrew ; Hallam, Keith Richard

  • Author_Institution
    Standard Telecommunication Laboratories, Harlow, Essex, UK
  • Volume
    4
  • Issue
    7
  • fYear
    1986
  • fDate
    7/1/1986 12:00:00 AM
  • Firstpage
    746
  • Lastpage
    750
  • Abstract
    The chemistry of reactions of CF2CI2used in optical fiber manufacture has been studied by infrared spectroscopy. Evidence is pesented to support a model of fluorine doping based on trichlorofluorosilane oxidation. Carbonyl fluoride has been identified as a major intermediate in the etching process.
  • Keywords
    Doping; Optical fiber materials/fabrication; Argon; Doping; Etching; Gases; Infrared spectra; Manufacturing; Optical fibers; Refractive index; Semiconductor process modeling; Temperature;
  • fLanguage
    English
  • Journal_Title
    Lightwave Technology, Journal of
  • Publisher
    ieee
  • ISSN
    0733-8724
  • Type

    jour

  • DOI
    10.1109/JLT.1986.1074829
  • Filename
    1074829
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1128056