Title :
Reducing Brownian motion in an electrostatically tunable MEMS laser
Author :
Huber, Dan ; Corredoura, Paul ; Lester, Steve ; Robbins, Virginia ; Kamas, Linda
Author_Institution :
Agilent Technol., Palo Alto, CA, USA
Abstract :
Brownian motion of a tunable vertical-cavity surface-emitting lasers (VCSEL) movable microelectromechanical systems (MEMS) mirror is shown to broaden the spectral width of the laser emission line. A low-noise wavelength feedback system is presented and evaluated. This feedback system is employed to reduce measured linewidth from 1050 to 400 MHz fullwidth at half-maximum (FWHM), an improvement of 62%. The effects of device design parameters on closed-loop Brownian motion levels are analyzed. The potential increases in performance resulting from vacuum packaging and advanced controller design are discussed.
Keywords :
Brownian motion; controllers; electronics packaging; laser feedback; laser mirrors; laser tuning; micromechanical devices; micromirrors; surface emitting lasers; 1050 to 400 MHz; Brownian motion reduction; Brownian noise; advanced controller design; closed-loop Brownian motion level; device design parameters; electrostatically tunable MEMS laser; fullwidth at half-maximum; laser emission line; laser noise; low-noise wavelength feedback system; microelectromechanical systems; movable MEMS mirror; spectral line width; tunable VCSEL; vacuum packaging; vertical-cavity surface-emitting lasers; Electrostatic measurements; Laser feedback; Microelectromechanical systems; Micromechanical devices; Mirrors; Packaging; Surface emitting lasers; Tunable circuits and devices; Vertical cavity surface emitting lasers; Wavelength measurement; Brownian noise; MEMS; laser noise; microelectromechanical systems; surface-emitting lasers;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2004.836290
