Optimization of high-speed metal-semiconductor-metal photodetectors

Author

Burm, J. ; Litvin, Kerry I. ; Schaff, William J. ; Eastman, Lester F.

Author_Institution

Sch. of Appl. & Eng. Phys., Cornell Univ., Ithaca, NY, USA

Volume

6

Issue

6

fYear

1994

fDate

6/1/1994 12:00:00 AM

Firstpage

722

Lastpage

724

Abstract

Circular-aperture Metal-Semiconductor-Metal (MSM) photodetectors have been fabricated in order to decrease the device capacitance. The frequency-response of the MSM photodetectors has been calculated using a first-order approximation. The design of the circular-aperture detectors and conventional square-aperture detectors has been optimized using this approximation. The largest 3 dB bandwidths are obtained with 33 fingers for the circular detectors and 29 for the square detectors. These numbers do not change regardless of the size of the MSM photodetectors.<>

Keywords

capacitance; high-speed optical techniques; metal-semiconductor-metal structures; photodetectors; MSM photodetectors; bandwidths; capacitance; circular-aperture detectors; fingers; first-order approximation; frequency-response; high-speed metal-semiconductor-metal photodetectors; optimization; square-aperture detectors; Bandwidth; Capacitance measurement; Detectors; Fingers; Frequency response; Geometrical optics; Inductance measurement; Laboratories; Laser beams; Photodetectors;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.300174

Filename

300174