Title :
Rigorous coupled-wave analysis of multilayered grating structures
Author :
Lee, Wook ; Degertekin, F. Levent
Author_Institution :
G. W. Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
Using a rigorous coupled-wave analysis, a (2 × 2) matrix method in homogenous layered media is generalized for a grating-embedded multilayer structure with (2M × 2M) dynamic and propagation matrices in both transverse-electric and transverse-magnetic polarizations, where M is the number of harmonics retained in the field expansion. A numerically stable algorithm to implement the method is described. Numerical results are presented for a diffraction-based optoacoustic sensor that consists of a reflective movable membrane and fixed grating fingers on a transparent quartz substrate and are compared with the scalar diffraction method to illustrate the limited applicability of the scalar approach.
Keywords :
acoustic transducers; acousto-optical effects; diffraction gratings; light diffraction; light polarisation; matrix algebra; micro-optics; optical multilayers; diffraction-based optoacoustic sensor; harmonics; multilayered grating structures; reflective movable membrane; rigorous coupled-wave analysis; scalar diffraction; transparent quartz substrate; transverse-electric polarization; transverse-magnetic polarization; Acoustic diffraction; Biomembranes; Dielectrics; Diffraction gratings; Geometry; Harmonic analysis; Nonhomogeneous media; Optical diffraction; Permittivity; Polarization; Multilayered grating structures; optoacoustic sensors; phase-sensitive diffraction grating;
Journal_Title :
Lightwave Technology, Journal of
DOI :
10.1109/JLT.2004.833278
