• DocumentCode
    1128691
  • Title

    Thermal annealing of He+implanted optical waveguides in LiNbO3

  • Author

    Naden, J. Mark ; Weiss, Bernard L.

  • Author_Institution
    University of Surrey, Guildford, Surrey, England
  • Volume
    4
  • Issue
    9
  • fYear
    1986
  • fDate
    9/1/1986 12:00:00 AM
  • Firstpage
    1402
  • Lastpage
    1406
  • Abstract
    The annealing of He+implanted optical waveguides is required to reduce the damage in the guiding layer of the sample. Results of the effect of this process are presented together with the aging characteristics of these waveguides which are due to room temperature annealing. The effect of sample temperature during implantation is also presented which may be considered as an annealing process occurring during implantation.
  • Keywords
    Ion implantation; Optical planar waveguides; Planar optical waveguide; Thermal factors; Aging; Annealing; Helium; Implants; Optical attenuators; Optical refraction; Optical variables control; Optical waveguides; Refractive index; Temperature;
  • fLanguage
    English
  • Journal_Title
    Lightwave Technology, Journal of
  • Publisher
    ieee
  • ISSN
    0733-8724
  • Type

    jour

  • DOI
    10.1109/JLT.1986.1074900
  • Filename
    1074900
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1128691