New fabrication of high-frequency (100-MHz) ultrasound PZT film kerfless linear array [Correspondence]

Author

Benpeng Zhu ; Ngai Yui Chan ; Jiyan Dai ; Shung, K. Kirk ; Takeuchi, Shoji ; Qifa Zhou

Author_Institution

Sch. of Opt. & Electron. Inf., Huazhong Univ. of Sci. & Technol., Wuhan, China

Volume

60

Issue

4

fYear

2013

fDate

Apr-13

Firstpage

854

Lastpage

857

Abstract

The paper describes the design, fabrication, and measurements of a high-frequency ultrasound kerfless linear array prepared from hydrothermal lead zirconate titanate (PZT) thick film. The 15-μm hydrothermal PZT thick film with an area of 1 × 1 cm, obtained through a self-separation process from Ti substrate, was used to fabricate a 32-element 100-MHz kerfless linear array with photolithography. The bandwidth at -6 dB without matching layer, insertion loss around center frequency, and crosstalk between adjacent elements were measured to be 39%, -30 dB, and -15 dB, respectively.

Keywords

ferroelectric materials; lead compounds; photolithography; thick films; PZT; Ti; crosstalk; frequency 100 MHz; hydrothermal PZT thick film; hydrothermal lead zirconate titanate; insertion loss; photolithography; self-separation process; size 15 mum; ultrasound PZT film kerfless linear array;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2013.2635

Filename

6489821