Sensitivity enhancement by surface texturing of Ag-doped BaTiO3-CuO thin film for CO2 gas sensor

Author

Rudraswamy, S.B. ; Bhat, Navakanta

Author_Institution

Indian Inst. of Sci., Bangalore, India

fYear

2014

fDate

14-17 Dec. 2014

Firstpage

30

Lastpage

32

Abstract

Surface texturing by fabricating micro and nano pillars of Ag-doped BaTiO₃-CuO on Ag-doped BaTiO₃-CuO mixed oxide thin films are evaluated for sensitivity enhancement for CO₂ gas. The metal oxide film of 250 nm thickness is deposited on oxidized p-type Si <;100> substrate by RF Sputtering. Micro pillars of length 150 nm, 5um diameter and nano pillars of length 150 nm, 200 nm diameter of Ag-doped BaTiO₃-CuO mixed oxide are fabricated on top of the film using lithography process. Sensing characteristics for different CO₂ concentration are obtained for different operating temperatures. Surface textured sensor device shows enhanced sensitivity over thin film sensor.

Keywords

barium compounds; carbon compounds; copper compounds; gas sensors; nanofabrication; nanolithography; nanosensors; nanostructured materials; silver; sputter deposition; surface texture; thin films; (BaTiO₃-CuO):Ag; CO₂; RF sputtering; gas sensor; lithography process; micropillars; mixed oxide thin films; nanopillars; p-type <;100> substrate; sensitivity enhancement; size 150 nm; size 200 nm; surface texturing; Films; Gas detectors; Nanostructures; Sensitivity; Surface texture; Zinc oxide; BaTiO3CuO; Carbon dioxide; Gas sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2014 Conference on

Conference_Location

Perth, WA

Print_ISBN

978-1-4799-6867-1

Type

conf

DOI

10.1109/COMMAD.2014.7038644

Filename

7038644