Title :
Growth prediction method for new biocompatible piezoelectric thin films
Author :
Yasoda, Yutaka ; Uetsuji, Yasutomo ; Tsuchiya, Kazuyoshi
Author_Institution :
Course of Mech. Eng., Tokai Univ., Hiratsuka, Japan
Abstract :
We have focused on MgSiO3 (Magnesium Silicate) which is a new biocompatible piezoelectric material having large spontaneous polarization. Then, crystal thin film growth prediction method was improved in order to predict growth orientation of the non-preferred orientation direction. Calculated total energy in each orientation of distorted crystal by the buffer layer was compared to the value in the stable structure. Total energy difference between the stable state and each crystal orientation pattern showed a trend similar to that of the X-ray peak intensity. Then, energy difference needed to be below 0.001 eV for crystal to be grown.
Keywords :
X-ray diffraction; buffer layers; crystal orientation; dielectric polarisation; magnesium compounds; piezoelectric thin films; total energy; MgSiO3; X-ray peak intensity; biocompatible piezoelectric material; biocompatible piezoelectric thin film growth; buffer layer; crystal orientation pattern; crystal thin film growth prediction method; distorted crystal orientation; magnesium silicate; spontaneous polarization; total energy; Atomic layer deposition; Buffer layers; Crystals; Lattices; Piezoelectric materials; Piezoelectricity; Prediction methods; crystal micro structure; epitaxial layers; piezoelectric films; piezoelectric materials;
Conference_Titel :
Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2014 Conference on
Conference_Location :
Perth, WA
Print_ISBN :
978-1-4799-6867-1
DOI :
10.1109/COMMAD.2014.7038672
