Title :
Measurement of surface roughness in buried channel waveguides
Author :
Ladouceur, Francois ; Love, J.D.
Author_Institution :
Australian Nat. Univ., Canberra, ACT, Australia
fDate :
7/2/1992 12:00:00 AM
Abstract :
An atomic force microscope is employed in a novel method for measuring the edge roughness of masks used in the fabrication of rectangular-core buried channel waveguides. Light attenuation due to scattering loss from the sides of the core can then be estimated using a simple statistical model of the data.
Keywords :
atomic force microscopy; light scattering; optical losses; optical waveguides; surface topography measurement; AFM; atomic force microscope; buried channel waveguides; light attenuation estimation; mask edge roughness; rectangular-core; scattering loss; statistical model; surface roughness; waveguide fabrication mask;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19920839
