مرکز منطقه ای اطلاع رساني علوم و فناوري - First Insight Into the Lifetime Acceleration Model of High-<formula formulatype="inline"> <img src="/images/tex/348.gif" alt="k"> </formula> <formula formulatype="inline"> <img src="/images/tex/18843.gif" alt="\\hbox {ZrO}_{2}/\\hbox {SiO}

Title :

First Insight Into the Lifetime Acceleration Model of High- $k$ $\\hbox {ZrO}_{2}/\\hbox {SiO}_{2}/\\hbox {ZrO</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Author : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>Agaiby, Rimoon ; Hofmann, Peter ; Zhou, Dayu ; Kerber, Martin ; Heitmann, Johannes ; Schroeder, Uwe ; Erben, Eike ; Oberbeck, Lars</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Author_Institution : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>Qimonda Dresden GmbH, Dresden</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Volume : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>30</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Issue : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>4</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>fYear : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>2009</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>fDate : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>4/1/2009 12:00:00 AM</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Firstpage : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>340</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Lastpage : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>342</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Abstract : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>Long-term reliability results over six orders of magnitude in time are presented showing that the voltage acceleration model for ZrO<sub>2</sub>/SiO<sub>2</sub>/ZrO<sub>2</sub> exhibits an exponential dependence with voltage, down to 2 V. The voltage acceleration parameter gamma is between 10 and 15 V<sup>-1</sup>, depending on the biasing polarity. Soft-breakdown behavior (SILC) is evident prior to the onset of hard breakdown as a result of barrier lowering or charge accumulation in the high- <i>k</i> film. Under ac stress conditions, this SILC branch is lowered in magnitude, translating to a gain in lifetime to breakdown.</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Keywords : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>DRAM chips; reliability; silicon compounds; zirconium compounds; DRAM technology; SILC; ZrO<sub>2</sub>-SiO<sub>2</sub>-ZrO<sub>2</sub>; lifetime acceleration model; long-term reliability; soft-breakdown behavior; voltage acceleration model; <formula formulatype=$ $hbox{ZrO}_{2}$; Long-term TDDB; MIM capacitor;