Title :
Closed form expressions for RF MEMS switch actuation and release time
Author_Institution :
Inst. for Micromanufacturing, Louisiana Tech Univ., Ruston, LA
Abstract :
Closed form expressions for RF MEMS switch actuation and release times are derived. The expressions account for the mechanical and electrical parameters and are valid for V>1.15>VP and Q>0.1 where V is the actuation voltage, V P is the pull-in voltage, and Q is the mechanical quality factor.
Keywords :
Q-factor; microswitches; RF MEMS switch actuation; actuation voltage; closed form expressions; electrical parameter; mechanical parameter; mechanical quality factor; pull-in voltage;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20093281
