Title :
Reflection-type continuously-tunable phase shifter using PZT thin-film capacitors
Author :
Judy, D.C. ; Qiu, J.X. ; Pulskamp, Jeffrey S. ; Polcawich, Ronald G. ; Kaul, Roger
Author_Institution :
US Army Res. Lab., Adelphi, MD
Abstract :
The design, fabrication and performance of a reflection-type tunable phase shifter based on a lead zirconate titanate (PZT) thin-film process is presented. The phase shifter consists of a coplanar waveguide Lange coupler on high resistivity silicon (HRSi) and two ferroelectric PZT varactors. At 12 GHz, the varactors achieve a capacitance tuning range of 5.5 to 1 along with a phase shift of 86 with bias voltages in the range 0-26 V. Analysis of the losses due to the varactors and the rest of the phase shifter is also presented.
Keywords :
coplanar waveguides; lead compounds; phase shifters; thin film capacitors; varactors; waveguide couplers; zinc compounds; PZT; PZT thin-film capacitors; coplanar waveguide Lange coupler; frequency 12 GHz; high resistivity silicon; reflection-type continuously-tunable phase shifter; two ferroelectric PZT varactors; voltage 0 V to 26 V;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20093372
