Title :
On the Magnetic Field Profile in a High-Power Planar Magnetron Discharge
Author :
Abolmasov, S.N. ; Bizyukov, A.A.
Author_Institution :
Venture Bus. Lab., Kyoto Univ., Japan
Abstract :
A simple analytical model is used to describe the effect of the Hall current on the external magnetic field in a high-power planar magnetron. The model predicts that when the Hall current reaches a sufficient value, the magnetic field profile changes its configuration from transverse (arch) into quasi-longitudinal. According to the model, plasma diamagnetism might be a cause of anomalously high cross field electron transport observed in circular planar magnetrons.
Keywords :
high-frequency discharges; magnetrons; plasma diamagnetism; plasma magnetohydrodynamics; plasma transport processes; Hall current; cross field electron transport; high-power planar magnetron discharge; magnetic field profile; plasma diamagnetism; Analytical models; Electrons; Fault location; Magnetic fields; Magnetic flux; Permanent magnets; Plasma density; Plasma sheaths; Plasma transport processes; Sputtering; Anomalous electron transport; Hall current; magnetron discharge; plasma diamagnetism;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.852358
