DocumentCode
1137864
Title
Subμm registration of fiducial marks using machine vision
Author
Tichem, M. ; Cohen, M.S.
Author_Institution
Fac. of Mech. Eng. & Marine Technol., Delft Univ. of Technol., Netherlands
Volume
16
Issue
8
fYear
1994
fDate
8/1/1994 12:00:00 AM
Firstpage
791
Lastpage
794
Abstract
Subμm registration between circularly symmetric fiducial marks can be achieved simply by finding their centroids by fitting circles to distributed edge positions determined by the second-derivative zero-crossing method. However, because of diffraction fringes, substantial errors originating in the tilt of the microscope optical axis must be minimized. This method is used for laser-fibre alignment tolerance studies
Keywords
computer vision; optical fibres; optical microscopy; optical workshop techniques; semiconductor lasers; centroids; circularly symmetric fiducial marks; diffraction fringes; distributed edge positions; fiducial marks; laser-fibre alignment tolerance; machine vision; microscope optical axis; second-derivative zero-crossing method; subμm registration; Automation; Fiber lasers; Machine vision; Marine technology; Optical device fabrication; Optical diffraction; Optical microscopy; Optical transmitters; Production; Solids;
fLanguage
English
Journal_Title
Pattern Analysis and Machine Intelligence, IEEE Transactions on
Publisher
ieee
ISSN
0162-8828
Type
jour
DOI
10.1109/34.308473
Filename
308473
Link To Document