Title :
Subμm registration of fiducial marks using machine vision
Author :
Tichem, M. ; Cohen, M.S.
Author_Institution :
Fac. of Mech. Eng. & Marine Technol., Delft Univ. of Technol., Netherlands
fDate :
8/1/1994 12:00:00 AM
Abstract :
Subμm registration between circularly symmetric fiducial marks can be achieved simply by finding their centroids by fitting circles to distributed edge positions determined by the second-derivative zero-crossing method. However, because of diffraction fringes, substantial errors originating in the tilt of the microscope optical axis must be minimized. This method is used for laser-fibre alignment tolerance studies
Keywords :
computer vision; optical fibres; optical microscopy; optical workshop techniques; semiconductor lasers; centroids; circularly symmetric fiducial marks; diffraction fringes; distributed edge positions; fiducial marks; laser-fibre alignment tolerance; machine vision; microscope optical axis; second-derivative zero-crossing method; subμm registration; Automation; Fiber lasers; Machine vision; Marine technology; Optical device fabrication; Optical diffraction; Optical microscopy; Optical transmitters; Production; Solids;
Journal_Title :
Pattern Analysis and Machine Intelligence, IEEE Transactions on
