Title :
Technique for measurements of semiconductor devices between 2 and 300 K
Author :
Kindl, Ottmar W. ; Langheinrich, Werner A.
Author_Institution :
Inst. of Semicond. Electron., Tech. Univ. of Darmstadt, West Germany
fDate :
8/1/1989 12:00:00 AM
Abstract :
A computer-controlled test measurement setup that permits full automatic acquisition of device characteristics in the temperature range from 2 to 300 K is described. The required equipment, the special construction of a suitable cold work area inside of a helium dewar, and a typical cooling procedure are discussed in detail. Typical measurement data give an idea of the studies of device behaviour versus temperature that are possible with the test assembly
Keywords :
automatic test equipment; low-temperature techniques; semiconductor device testing; 2 to 300 K; automatic acquisition; cold work area; computer-controlled test measurement; cooling procedure; semiconductor devices; Assembly; Blades; Electronic equipment testing; Helium; Laboratories; Nitrogen; Readout electronics; Semiconductor device measurement; Semiconductor devices; Temperature;
Journal_Title :
Electron Devices, IEEE Transactions on
